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        Zheng et al., 2012 - MFT-4000
        

        來(lái)源:  華匯儀器   作者:  D. Hosner   時(shí)間:  2016-10-29  點(diǎn)擊:  
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	Zheng, J.Y., Hao, J.Y., Liu, X.Q., Liu, W.M., Properties of TiN/TiCN multilayer films by direct current magnetron sputtering. Journal of Physics D: Applied Physics (45, 9), Article id. 095303, 2012, 9pp.